Prof. Laurent Karsenti
Project Manager DFM at Magma Design Automation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 April 2010
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Statistical analysis, Etching, Inspection, Control systems, Finite element methods, Wafer inspection, Optical proximity correction, Optical alignment, Semiconducting wafers, Defect inspection

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Lithography, Metrology, Modulation, Inspection, Finite element methods, Design for manufacturing, Optical proximity correction, SRAF, Semiconducting wafers, Defect inspection

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Optical transfer functions, Metrology, Scanning electron microscopy, Finite element methods, Photomasks, Optical proximity correction, Computer aided design, Semiconducting wafers, Defect inspection

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