Mr. Laurent Lecarpentier
at STMicroelectronics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Reticles, Logic, Inspection, Scanning electron microscopy, Transmission electron microscopy, Process control, Photomasks, Critical dimension metrology, Semiconducting wafers, Phase shifts, Defect inspection

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Reticles, Metrology, Detection and tracking algorithms, Etching, Scanners, Error analysis, Inspection, Scanning electron microscopy, Semiconducting wafers, Overlay metrology

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