Dr. Laurent Montès
at IMEP-LAHC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 10, 2013
Proc. SPIE. 8765, Bio-MEMS and Medical Microdevices
KEYWORDS: Microelectromechanical systems, Semiconductors, Actuators, Oxides, Optical lithography, Silicon, Finite element methods, Aluminum, Thermal modeling, Temperature metrology

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