Dr. Laurent Marinier
at Philips Research
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Monochromatic aberrations, Point spread functions, Defect detection, Scattering, Particles, Scanning electron microscopy, Pellicles, Mie scattering, Immersion lithography, Liquids

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