Dr. Laurent Milord
Ph.D. Student at CEA-LETI
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10108, Silicon Photonics XII
KEYWORDS: Mid-IR, Etching, Luminescence, Germanium, Gases, Laser applications, Scanning electron microscopy, Raman spectroscopy, Photonics, Plasma etching, Silicon photonics, Anisotropic etching, Isotropic etching, Tin

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