Dr. Lawrence Levit
at TREK Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Nanotechnology, Reticles, Electrodes, Metals, Inspection, Photomasks, Antennas, Atomic force microscope, Oscilloscopes, Electromagnetic coupling

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Optical microscopes, Reticles, Metrology, Optical lithography, Foam, Ions, Atomic force microscopy, Photoresist materials, Photomasks, Semiconducting wafers

Proceedings Article | 11 March 2002
Proc. SPIE. 4562, 21st Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Quartz, Electrons, Nitrogen, Oxygen, Atmospheric physics, Humidity, Vacuum ultraviolet, Environmental sensing

Proceedings Article | 9 April 2001
Proc. SPIE. 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Reticles, Quartz, Electrodes, Dielectrics, Ions, Diagnostics, Physics, Photomasks, Aluminum, Semiconducting wafers

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