Dr. Lawrence P. Muray
Sr. Director, Inspection Technology at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Wafer-level optics, Electron beams, Lenses, Silicon, Manufacturing, Monte Carlo methods, Objectives, Tolerancing, Optics manufacturing, Charged particle optics

PROCEEDINGS ARTICLE | May 22, 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Lithography, Electron beams, Silicon, Manufacturing, Image resolution, Optical testing, Scanning electron microscopy, Objectives, Optical simulations, Beam shaping

PROCEEDINGS ARTICLE | October 25, 2004
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Mirrors, Beam steering, Switches, Electrodes, Matrices, Ceramics, Manufacturing, Free space optics, Tolerancing

PROCEEDINGS ARTICLE | October 3, 1993
Proc. SPIE. 10310, Technology of Proximal Probe Lithography

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