Le Trong Thao
PhD Student
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 March 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Thin films, Optical lithography, Resonators, Quartz, Sputter deposition, Electrodes, Silicon, Aluminum, Aluminum nitride, Acoustics

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