Prof. Lei Chen
at Nanjing Univ of Science & Technology
SPIE Involvement:
Author
Publications (45)

SPIE Journal Paper | 30 December 2020
OE Vol. 59 Issue 12

SPIE Journal Paper | 5 March 2020
OE Vol. 59 Issue 03
KEYWORDS: Calibration, Phase shifts, Fourier transforms, Error analysis, Optical engineering, Laser sources, Image segmentation, Fizeau interferometers, Polarization, Spiral phase plates

Proceedings Article | 4 June 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Optical design, Phase shifting, Interferometry, Phase interferometry, Photomasks, Extreme ultraviolet, Reconstruction algorithms, Phase measurement, Phase shifts, Diffraction gratings

Proceedings Article | 7 November 2018 Paper
Proc. SPIE. 10832, Fifth Conference on Frontiers in Optical Imaging Technology and Applications
KEYWORDS: Target detection, Polarization, Error analysis, Light scattering, Polarizers, Numerical analysis, Image quality, Specular reflections, Charge-coupled devices, Camouflage

Proceedings Article | 9 October 2018 Presentation + Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Mathematical modeling, Diffraction, Interferometers, Sensors, Interferometry, Wavefronts, Extreme ultraviolet, Geometrical optics, Wavefront metrology, Shearing interferometers

Showing 5 of 45 publications
Conference Committee Involvement (2)
Optical Design and Testing III
12 November 2007 | Beijing, China
Optical Design and Testing II
8 November 2004 | Beijing, China
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