Dr. Lei Wang
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
KEYWORDS: Electron beam lithography, Manufacturing, Optical communications, Nanoimprint lithography, Optical alignment, Reactive ion etching, Dense wavelength division multiplexing, Semiconducting wafers, Optics manufacturing, Nanolithography

PROCEEDINGS ARTICLE | October 22, 2010
Proc. SPIE. 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Polymers, Ultraviolet radiation, Particles, Silicon, Photonic crystals, Optoelectronics, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Nanolithography

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