Dr. Lei Wang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 8, 2017
Proc. SPIE. 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016
KEYWORDS: Hyperspectral imaging, Mirrors, Imaging systems, Sensors, Dispersion, Spectroscopy, Remote sensing, Physics, Imaging spectroscopy, Motion controllers

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Particles, Manufacturing, Photomasks, Particle swarm optimization, Source mask optimization, Algorithm development, Molybdenum, Resolution enhancement technologies

SPIE Journal Paper | February 19, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Particle swarm optimization, Particles, Photomasks, Optical lithography, Lithographic illumination, Lithography, Optimization (mathematics), Source mask optimization, Image quality, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Genetic algorithms, Optical lithography, Particles, Image quality, Photomasks, Particle swarm optimization, Source mask optimization, Optimization (mathematics), Resolution enhancement technologies

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