Mr. Lei Zhang
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 27, 2013
Proc. SPIE. 8625, Gallium Nitride Materials and Devices VIII
KEYWORDS: Semiconductors, Dry etching, Satellites, Diffusion, Single photon, Nitrogen, Chromium, Quantum dots, Indium gallium nitride, Temperature metrology

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