Dr. Leifeng Cao
at China Academy of Engineering Physics
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Gold, Lithography, Electron beam lithography, Diffraction, Spectroscopy, X-rays, X-ray diffraction, X-ray lithography, Diffraction gratings

SPIE Journal Paper | August 19, 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

PROCEEDINGS ARTICLE | August 25, 2010
Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III
KEYWORDS: Optical components, Microscopes, Mirrors, Multilayers, Copper, Reflectivity, Objectives, Spatial resolution, Plasma diagnostics, Plasma

SPIE Journal Paper | May 1, 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Gold, Electron beam lithography, Diffraction, Electron beams, Spectroscopy, X-rays, X-ray diffraction, Silicon, Photomasks, X-ray lithography

PROCEEDINGS ARTICLE | November 14, 2007
Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Gold, Electron beam lithography, X-ray optics, Diffractive optical elements, X-rays, X-ray diffraction, Silicon, Photomasks, Electroplating, X-ray lithography

Showing 5 of 7 publications
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