The design of two different terahertz on-chip antennas operating at 300GHz based on TSMC 40nm CMOS process is presented. On the basis of the rectangular radiation patch, the antennas are slotted according to the meandering technique, including double T-shaped slot antenna and double E-shaped slot antenna. The different shapes of slots designed in the radiation patch can increase the current density of the antenna effectually by altering the current path on the surface of the patch antenna, which can also increase the equivalent length of the antenna. Subsequently, it can decrease the area of the antenna efficiently and achieve miniaturization. At the same time, the bandwidth and gain of the antenna are improved, the double E-shaped slot antenna has a better bandwidth with the smallest size. It shows that the bandwidth of the double E-shaped slot antenna is about 179GHz (272GHz~451GHz). The gain and the radiation efficiency are 2.54dB and 49.4%, respectively. The performance of the two proposed antennas can be verified by the measurement by applying them in terahertz circuits.
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