Dr. Lena V. Zavyalova
Engineer at Synopsys Inc
SPIE Involvement:
Author
Publications (37)

Proceedings Article | 10 April 2024 Presentation + Paper
Kevin Lucas, Elizabeth Grubbs, Folarin Latinwo, Delian Yang, Bernd Kuechler, Linghui Wu, Enas Sakr, Hyesook Hong, Lena Zavyalova, Yan Feng
Proceedings Volume 12954, 129540S (2024) https://doi.org/10.1117/12.3013125
KEYWORDS: 3D modeling, Modeling, Lithography, Data modeling, Calibration, Deep ultraviolet, Optical proximity correction, Extreme ultraviolet, Photoresist processing, Shrinkage

Proceedings Article | 13 April 2021 Presentation + Paper
Proceedings Volume 11614, 116140B (2021) https://doi.org/10.1117/12.2587225
KEYWORDS: Etching, Optical proximity correction, Machine learning, Photomasks, Model-based design, Semiconductors, Neural networks, Extreme ultraviolet lithography, Deep ultraviolet

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11614, 116140R (2021) https://doi.org/10.1117/12.2584940
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Manufacturing, Critical dimension metrology, Semiconductors, Photomasks, Semiconducting wafers, Optical lithography, Neural networks

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 905222 (2014) https://doi.org/10.1117/12.2049003
KEYWORDS: Etching, 3D modeling, Optical proximity correction, Lithography, Calibration, Data modeling, Semiconducting wafers, Photomasks, Photoresist processing, Integrated modeling

Proceedings Article | 12 April 2013 Paper
Yongfa Fan, Qing Yang, Lena Zavyalova, Kar Kit Koh, Wolfgang Hoppe, Bernd Kuechler, Puvan Perampalam, Makoto Miyagi, Thomas Schmoeller
Proceedings Volume 8683, 868318 (2013) https://doi.org/10.1117/12.2011852
KEYWORDS: 3D modeling, Data modeling, Etching, Optical proximity correction, Calibration, Lithography, Scanning electron microscopy, 3D image processing, Semiconducting wafers, Statistical modeling

Showing 5 of 37 publications
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