Dr. Leonard Elliott Klebanoff
Principle Member of Lab at Sandia National Labs California
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Carbon, Sputter deposition, Ions, Silicon, Xenon, Silicon carbide, Molybdenum, Pulsed laser operation, Plasma

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Gold, Sputter deposition, Particles, Ions, Silicon, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Plasma

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Mathematical modeling, Carbon, Contamination, Data modeling, Photons, Molecules, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, EUV optics

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Oxides, Mirrors, Electrons, Silicon, Reflectivity, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Oxidation

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Mirrors, Electron beams, Photons, Electrons, Silicon, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Wafer-level optics, Carbon, Lithography, Contamination, Spectroscopy, Silicon, Hydrogen, Reflectivity, Extreme ultraviolet, EUV optics

Showing 5 of 19 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top