Dr. Leonidas E. Ocola
Physicist at Argonne National Lab
SPIE Involvement:
Conference Chair | Conference Program Committee | Author
Publications (22)

Proceedings Article | 2 January 2018
Proc. SPIE. 10456, Nanophotonics Australasia 2017
KEYWORDS: Near infrared, Electron beams, Astronomy, Resonators, Waveguides, Polarization, Silicon, Linear filtering, Space telescopes, Semiconducting wafers

Proceedings Article | 17 May 2017
Proc. SPIE. 10242, Integrated Optics: Physics and Simulations III
KEYWORDS: Optical filters, Astronomy, Resonators, Waveguides, Silicon, Optical interferometry, Integrated optics, Astronomical instrumentation, Planar waveguides, Phase shifts, Astrophotonics

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Polymethylmethacrylate, Phase modulation, Polymers, Luminescence, Photons, Molecules, Electrons, Quantum efficiency, Photodiodes, Photoresist materials, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography, Molecular interactions

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electron beams, Polymers, Molecules, Mass spectrometry, Photoresist materials, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography, Molecular interactions, Photochemistry, Absorption, Chemically amplified resists

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Particles, Photons, Copper, Electrons, Silicon, Monte Carlo methods, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography, Solid modeling

Showing 5 of 22 publications
Conference Committee Involvement (2)
Nanofabrication: Technologies, Devices, and Applications II
23 October 2005 | Boston, MA, United States
Nanofabrication: Technologies, Devices, and Applications
25 October 2004 | Philadelphia, Pennsylvania, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top