Dr. Leslie L. Deck
Senior Physicist at Zygo Corporation
SPIE Involvement:
Conference Program Committee | Author
Publications (20)

PROCEEDINGS ARTICLE | August 7, 2018
Proc. SPIE. 10829, Fifth European Seminar on Precision Optics Manufacturing
KEYWORDS: Optical components, Optical transfer functions, Metrology, Spatial frequencies, Cameras, Error analysis, Spectral resolution, Laser metrology, Surface finishing, Fizeau interferometers

PROCEEDINGS ARTICLE | May 21, 2018
Proc. SPIE. 10676, Digital Optics for Immersive Displays
KEYWORDS: Optical components, Diamond turning, Metrology, Interferometers, Cameras, Glasses, Interferometry, Optical metrology, Planar waveguides, RGB color model

PROCEEDINGS ARTICLE | September 14, 2011
Proc. SPIE. 8133, Dimensional Optical Metrology and Inspection for Practical Applications
KEYWORDS: Photovoltaics, Monochromatic aberrations, Beam splitters, Interferometers, Cameras, Sensors, Glasses, Image resolution, Distortion, Pellicles

PROCEEDINGS ARTICLE | August 21, 2009
Proc. SPIE. 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III
KEYWORDS: Modulation, Interferometers, Sensors, Calibration, Interferometry, Phase shift keying, Modulators, Heterodyning, Distance measurement, Phase measurement

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Phase shifting, Cameras, Sensors, Calibration, Error analysis, Interference (communication), Phase interferometry, Optical testing, Algorithm development, Phase shifts

PROCEEDINGS ARTICLE | September 27, 2007
Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II
KEYWORDS: Error analysis, Reflectivity, Interferometry, Distortion, Phase interferometry, Spatial resolution, Phase measurement, Environmental sensing, Phase shifts, Virtual colonoscopy

Showing 5 of 20 publications
Conference Committee Involvement (5)
Advances in Metrology for X-Ray and EUV Optics V
18 August 2014 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics IV
12 August 2012 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics III
1 August 2010 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics II
30 August 2007 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics
2 August 2005 | San Diego, California, United States
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