Dr. Leslie L. Deck Profile

Dr. Leslie L. Deck

Senior Physicist at Zygo Corporation

SPIE Involvement:

Conference Program Committee | Author

Publications (20)

PROCEEDINGS ARTICLE | August 7, 2018

Characterizing the resolving power of laser Fizeau interferometers

Proc. SPIE. 10829, Fifth European Seminar on Precision Optics Manufacturing

KEYWORDS: Optical components, Optical transfer functions, Metrology, Spatial frequencies, Cameras, Error analysis, Spectral resolution, Laser metrology, Surface finishing, Fizeau interferometers

Read Abstract

PROCEEDINGS ARTICLE | May 21, 2018

Optical metrology for immersive display components and subsystems

Proc. SPIE. 10676, Digital Optics for Immersive Displays

KEYWORDS: Optical components, Diamond turning, Metrology, Interferometers, Cameras, Glasses, Interferometry, Optical metrology, Planar waveguides, RGB color model

Read Abstract

PROCEEDINGS ARTICLE | September 14, 2011

Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

Proc. SPIE. 8133, Dimensional Optical Metrology and Inspection for Practical Applications

KEYWORDS: Photovoltaics, Monochromatic aberrations, Beam splitters, Interferometers, Cameras, Sensors, Glasses, Image resolution, Distortion, Pellicles

Read Abstract

PROCEEDINGS ARTICLE | August 21, 2009

High-performance multi-channel fiber-based absolute distance measuring interferometer system

Proc. SPIE. 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III

KEYWORDS: Modulation, Interferometers, Sensors, Calibration, Interferometry, Phase shift keying, Modulators, Heterodyning, Distance measurement, Phase measurement

Read Abstract

PROCEEDINGS ARTICLE | August 11, 2008

New algorithms and error analysis for sinusoidal phase shifting interferometry

Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis

KEYWORDS: Phase shifting, Cameras, Sensors, Calibration, Error analysis, Interference (communication), Phase interferometry, Optical testing, Algorithm development, Phase shifts

Read Abstract

PROCEEDINGS ARTICLE | September 27, 2007

Suppressing vibration errors in phase-shifting interferometry

Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II

KEYWORDS: Error analysis, Reflectivity, Interferometry, Distortion, Phase interferometry, Spatial resolution, Phase measurement, Environmental sensing, Phase shifts, Virtual colonoscopy

Read Abstract

PROCEEDINGS ARTICLE | May 14, 2007

High precision interferometer for measuring mid-spatial frequency departure in free form optics

Proc. SPIE. 10316, Optifab 2007: Technical Digest

KEYWORDS: Microscopes, Metrology, Spatial frequencies, Interferometers, Calibration, Error analysis, Interferometry, Objectives, Aspheric lenses, Environmental sensing

Read Abstract

PROCEEDINGS ARTICLE | May 14, 2007

Compensation of vibration errors in high-performance interferometry

Proc. SPIE. 10316, Optifab 2007: Technical Digest

KEYWORDS: Photovoltaics, Optical spheres, Spatial frequencies, Error analysis, Interferometry, Distortion, Optical testing, Aspheric lenses, Spatial resolution, Phase shifts

Read Abstract

PROCEEDINGS ARTICLE | September 1, 2005

High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics

Proc. SPIE. 5921, Advances in Metrology for X-Ray and EUV Optics

KEYWORDS: Microscopes, Spatial frequencies, Interferometers, Interferometry, Distortion, Optical testing, Turbulence, Objectives, Charge-coupled devices, Fizeau interferometers

Read Abstract

PROCEEDINGS ARTICLE | August 16, 2004

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining

KEYWORDS: Microelectromechanical systems, Thin films, Microscopes, Ferroelectric materials, Metrology, Defect detection, Microscopy, Optical microscopy, Interferometry, Microopto electromechanical systems

Read Abstract

PROCEEDINGS ARTICLE | August 2, 2004

Environmentally friendly interferometry

Proc. SPIE. 5532, Interferometry XII: Applications

KEYWORDS: Fringe analysis, Imaging systems, Spatial frequencies, Interferometers, Cameras, Image processing, Fourier transforms, Interferometry, Environmental sensing, Phase shifts

Read Abstract

PROCEEDINGS ARTICLE | August 28, 2003

Measurement of hard pellicles for 157-nm lithography using Fourier transform phase-shifting interferometry

Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X

KEYWORDS: Optical components, Lithography, Reticles, Manufacturing, Fourier transforms, Phase interferometry, Pellicles, Precision measurement, Wavelength tuning, Photomasks

Read Abstract

PROCEEDINGS ARTICLE | June 19, 2002

Absolute distance measurements using FTPSI with a widely tunable IR laser

Proc. SPIE. 4778, Interferometry XI: Applications

KEYWORDS: Tunable lasers, Interferometers, Laser development, Fourier transforms, Interferometry, Phase interferometry, Infrared lasers, Precision measurement, Distance measurement, Zerodur

Read Abstract

PROCEEDINGS ARTICLE | December 27, 2001

Multiple-surface phase-shifting interferometry

Proc. SPIE. 4451, Optical Manufacturing and Testing IV

KEYWORDS: Phase shifting, Reflection, Interferometers, Silicon, Fourier transforms, Interferometry, Phase interferometry, Optical testing, Precision measurement, Wavelength tuning

Read Abstract

PROCEEDINGS ARTICLE | November 11, 1999

Phase-shifting via wavelength tuning in very large aperture interferometers

Proc. SPIE. 3782, Optical Manufacturing and Testing III

KEYWORDS: Actuators, Phase shifting, Modulation, Imaging systems, Interferometers, Cameras, Optical testing, Collimators, Wavelength tuning, Phase shifts

Read Abstract

PROCEEDINGS ARTICLE | December 29, 1998

Coherence scanning in a geometrically desensitized interferometer

Proc. SPIE. 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV

KEYWORDS: Metrology, Coherence (optics), Imaging systems, Speckle, Interferometers, Cameras, Interferometry, Speckle pattern, Diffusers, Optical interferometry

Read Abstract

PROCEEDINGS ARTICLE | July 6, 1998

Adjustable coherence depth in a geometrically desensitized interferometer

Proc. SPIE. 3479, Laser Interferometry IX: Applications

KEYWORDS: Superposition, Light sources, Reflection, Interferometers, Cameras, Glasses, Interferometry, Chlorine, Grazing incidence, Light

Read Abstract

PROCEEDINGS ARTICLE | September 25, 1997

Reducing vibration effects in phase-shifting interferometry

Proc. SPIE. 3100, Sensors, Sensor Systems, and Sensor Data Processing

KEYWORDS: Interferometers, Cameras, Sensors, Interferometry, Phase interferometry, Data acquisition, Spatial resolution, Phase measurement, Imaging arrays, Phase shifts

Read Abstract

PROCEEDINGS ARTICLE | September 18, 1996

Optical flying-height testing of magnetic read-write heads

Proc. SPIE. 2782, Optical Inspection and Micromeasurements

KEYWORDS: Metrology, Polarization, In situ metrology, Magnetism, Interferometry, Optical testing, Head, Distance measurement

Read Abstract

PROCEEDINGS ARTICLE | November 15, 1994

Surface profiling by frequency-domain analysis of white light interferograms

Proc. SPIE. 2248, Optical Measurements and Sensors for the Process Industries

KEYWORDS: Microscopes, Coherence (optics), Interferometers, Data storage, Interferometry, Phase interferometry, Data acquisition, Profiling, Distance measurement, Data centers

Read Abstract

Showing 5 of 20 publications

Conference Committee Involvement (5)

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics IV

12 August 2012 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics III

1 August 2010 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics II

30 August 2007 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics

2 August 2005 | San Diego, California, United States

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years