Lewis A. Binns
Principal Physicist at ASML Netherlands BV
SPIE Involvement:
Author
Area of Expertise:
Overlay Metrology , Machine vision , Software development , Semiconductor Metrology , Image Processing , Systems integration
Websites:
Publications (19)

PROCEEDINGS ARTICLE | March 22, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Data modeling, Wafer-level optics, Optical testing, Process control, Photomasks, Etching, Scanners

PROCEEDINGS ARTICLE | March 22, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Overlay metrology, Calibration, Metrology, Reticles, Semiconducting wafers, Image processing, Reflectivity, Signal to noise ratio, Diagnostics, Radar

PROCEEDINGS ARTICLE | March 22, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Overlay metrology, Semiconducting wafers, Diffraction, Data modeling, Process control, Scanners, Reflectivity, Reticles, Tolerancing, Time metrology

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Calibration, Overlay metrology, Semiconducting wafers, Metrology, Photomasks, Standards development, Lithography, Manufacturing, Optics manufacturing, Optical calibration

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Data modeling, Mathematical modeling, Wafer testing, Reticles, Tolerancing, Error analysis, Process control

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Overlay metrology, Metrology, Photomasks, Imaging systems, Semiconducting wafers, Lithography, Manufacturing, Imaging metrology, Scanning electron microscopy, Optical lithography

Showing 5 of 19 publications
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