Prof. Li-Chia Tien Profile

Prof. Li-Chia Tien

Assistant Professor at Natioanl Dong Hwa Univ

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Proceedings Article | 20 August 2015 Paper

Growth of Bi2O3 nanocones over large areas by magnetron sputtering

Li-Chia Tien, Ying-Hong Liou

Proceedings Volume 9558, 95580X (2015) https://doi.org/10.1117/12.2186534

KEYWORDS: Bismuth, Sputter deposition, Nanostructures, Oxides, Transmission electron microscopy, Diffraction, Luminescence, Silicon, Temperature metrology, X-ray diffraction

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Bismuth oxide (Bi₂O₃) is a multi-functional oxide semiconductor with various properties of interest such as high reflective index, high photoconductive response, luminescence and high oxygen-ion conductivity, potentially useful as optical coatings, electrodes of solid oxide fuel cells (SOFC), supercapacitors, visible-light activated photocatalysts, and gas sensors. Large areas of bismuth oxide (Bi₂O₃) nanocones were grown onto Si(001) substrates by magnetron sputtering. The samples were characterized by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), and photoluminescence (PL). The obtained tapered nanostructures consist of high-density nanocones with diameters approximately 70–130 nm and lengths of 1–3 μm. XRD results reveal that the Bi₂O₃ nanocones can undergo a phase transition from the α to the β phase at growth temperatures over 450°C. This phase transition was confirmed by TEM and PL. The growth mechanism of Bi₂O₃ nanocones was identified as grain boundary-assisted growth, in which a Bi seeding layer is crucial to the formation of the nanostructures. The results herein suggest that introducing a surface seeding layer may provide an effective way to grow various 1D nanostructures over large areas in high yield by magnetron sputtering.

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