Dr. Li-Jui Chen
Principal Engineer at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Conference Program Committee | Author
Publications (18)

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Reticles, Deep ultraviolet, Scanners, Manufacturing, Distortion, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Overlay metrology

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Lithography, Metrology, Data modeling, Scanners, Control systems, Scatterometry, Finite element methods, Feedback control, Semiconducting wafers, Overlay metrology

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Metrology, Scanners, Scatterometry, 3D metrology, Finite element methods, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Back end of line

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Signal to noise ratio, Lithography, Metrology, Metals, Scanners, Scatterometry, Semiconducting wafers, Overlay metrology, Back end of line, Front end of line

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Metrology, Etching, Laser energy, Laser applications, Scanning electron microscopy, Laser scanners, 3D scanning, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Superposition, Microfluidics, Scanners, Particles, Digital watermarking, Computer simulations, Printing, System identification, Immersion lithography, Semiconducting wafers

Showing 5 of 18 publications
Conference Committee Involvement (5)
Extreme Ultraviolet (EUV) Lithography VII
22 February 2016 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VI
23 February 2015 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography V
24 February 2014 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography IV
25 February 2013 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography III
13 February 2012 | San Jose, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top