Dr. Li-Ting Tseng
at Paul Scherrer Institut
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 26 February 2020
Proc. SPIE. 11290, High Contrast Metastructures IX
KEYWORDS: Plasmonics, Nanostructures, Optical filters, Polarization, Silver, Polarizers, Wave plates, Liquid crystals, Tunable filters, Nanowires

SPIE Journal Paper | 30 January 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Extreme ultraviolet, Carbon, Reticles, Inspection, Defect detection, Coherence imaging, Photomasks, Phase measurement, Reflectivity, Microscopes

SPIE Journal Paper | 9 November 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Thin films, Zinc, Extreme ultraviolet lithography, Photoresist materials, Metals, FT-IR spectroscopy, Lithography, Absorption, Spectroscopy, Extreme ultraviolet

Proceedings Article | 9 October 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Scanning electron microscopy, Printing, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Diffraction gratings

Proceedings Article | 29 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Microscopes, Diffraction, Mirrors, Metrology, Sensors, Reflectivity, Image resolution, Photomasks, Extreme ultraviolet, Modulation transfer functions

Showing 5 of 10 publications
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