Dr. Li-Wen Chang
PostDoc at Stanford Univ
SPIE Involvement:
Publications (7)

Proceedings Article | 21 March 2012 Paper
He Yi, Xin-Yu Bao, Jie Zhang, Richard Tiberio, James Conway, Li-Wen Chang, Subhasish Mitra, H.-S. Philip Wong
Proceedings Volume 8323, 83230W (2012) https://doi.org/10.1117/12.912804
KEYWORDS: Optical lithography, Logic, Electron beam lithography, Transistors, Scanning electron microscopy, Binary data, Lithography, Very large scale integration, Silicon, Directed self assembly

Proceedings Article | 6 March 2012 Open Access Paper
H.-S. Philip Wong, Chris Bencher, He Yi, Xin-Yu Bao, Li-Wen Chang
Proceedings Volume 8323, 832303 (2012) https://doi.org/10.1117/12.918312
KEYWORDS: Optical lithography, Lithography, Semiconductors, Scanning electron microscopy, Baryon acoustic oscillations, Semiconductor manufacturing, Logic, Double patterning technology, Photomasks, Directed self assembly

Proceedings Article | 23 March 2011 Paper
Chris Bencher, Huixiong Dai, Liyan Miao, Yongmei Chen, Ping Xu, Yijian Chen, Shiany Oemardani, Jason Sweis, Vincent Wiaux, Jan Hermans, Li-Wen Chang, Xinyu Bao, He Yi, H.-S. Philip Wong
Proceedings Volume 7973, 79730K (2011) https://doi.org/10.1117/12.881679
KEYWORDS: Optical lithography, Photomasks, Line width roughness, Lithography, Semiconducting wafers, Back end of line, Double patterning technology, Logic, Extreme ultraviolet, Directed self assembly

Proceedings Article | 3 April 2010 Paper
Yang Hong, Li-Wen Chang, Albert Lin, H.-S. Philip Wong
Proceedings Volume 7637, 76371J (2010) https://doi.org/10.1117/12.848378
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Statistical analysis, Data analysis, Metrology, Image quality, Binary data, Image analysis, Scanning electron microscopy, Image processing

Proceedings Article | 2 April 2010 Paper
Li-Wen Chang, Xin-Yu Bao, H.-S. Philip Wong
Proceedings Volume 7637, 76370I (2010) https://doi.org/10.1117/12.848430
KEYWORDS: Etching, Annealing, Silicon, Atomic layer deposition, Chromium, Platinum, Optical lithography, Semiconducting wafers, Field effect transistors, Lithography

Showing 5 of 7 publications
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