Dr. Li-Wen Chang
PostDoc at Stanford Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Electron beam lithography, Logic, Optical lithography, Silicon, Scanning electron microscopy, Very large scale integration, Directed self assembly, Transistors, Binary data

Proceedings Article | 6 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Semiconductors, Lithography, Logic, Optical lithography, Scanning electron microscopy, Photomasks, Directed self assembly, Semiconductor manufacturing, Double patterning technology, Baryon acoustic oscillations

Proceedings Article | 23 March 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Logic, Optical lithography, Photomasks, Extreme ultraviolet, Line width roughness, Directed self assembly, Double patterning technology, Semiconducting wafers, Back end of line

Proceedings Article | 3 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Metrology, Statistical analysis, Polymethylmethacrylate, Image processing, Image analysis, Scanning electron microscopy, Image quality, Directed self assembly, Binary data, Data analysis

Proceedings Article | 2 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Optical lithography, Etching, Annealing, Silicon, Chromium, Platinum, Atomic layer deposition, Field effect transistors, Semiconducting wafers

Showing 5 of 7 publications
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