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Li-wen Liang
Masters Candidate at Guangdong Univ of Technology
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Publications (1)
SPIE Journal Paper | 6 October 2017
Suppression of imaging crack caused by the gap between micromirrors in maskless lithography
Liwen Liang, Jinyun Zhou, Liang Lei, Bo Wang, Qu Wang, Kunhua Wen
OE, Vol. 56, Issue 10, 106102, (October 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.10.106102
KEYWORDS: Micromirrors, Visualization, Digital micromirror devices, Maskless lithography, Diffraction, Coherence (optics), Projection systems, Light sources, Numerical simulations, Lithography
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