A new on-machine measurement technique is proposed to observe the quality of micro-hole in micro Electrical Discharge Machining (EDM) progress. Images of micro-hole are captured by means of a simple configuration use a light-emitting diode (LED) illuminator, optical fiber, and a camera charge-coupled device (CCD).The device does not make contact with workpiece and acquire the image from the contour of the finished micro-hole. Because of using the optical fiber to transmit the real-time image, the device can woke in the narrow and small place. Based on the detected feature points, the geometrical features of the finished micro-hole such as its aperture can be obtained in real time. Meanwhile, the measuring result shows the micro-hole is whether or not qualified and can optimize the process parameters.