Mr. Li J. Song
at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Lithography, Lithographic illumination, Metals, Manufacturing, Resistance, Optical proximity correction, Critical dimension metrology, Computer architecture, Resolution enhancement technologies, Fiber optic illuminators

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