Dr. Li Tan
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymers, Silicon, Atomic force microscopy, Printing, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Polymer thin films

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