Dr. Li Wang
at Xi'an Jiaotong Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 November 2008
OE Vol. 47 Issue 11
KEYWORDS: Optical alignment, Fringe analysis, Semiconducting wafers, Lithography, Image processing, Error analysis, Fourier transforms, CCD cameras, Optical engineering, Spatial frequencies

Proceedings Article | 9 June 2006
Proc. SPIE. 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Lithography, Optical filters, Moire patterns, Error analysis, Detector arrays, Optical alignment, Signal generators, Semiconducting wafers, Signal detection, Submicron lithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top