Dr. Liang Cao
Senior Engineer at
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Edge detection, Detection and tracking algorithms, Silicon, Feature extraction, Printing, Gaussian filters, Image filtering, Image classification, SRAF, Semiconducting wafers

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Metrology, Statistical analysis, Data modeling, Image processing, Silicon, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 5, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Lithography, Genetic algorithms, Ions, Computer simulations, Bridges, Genetics, Optical proximity correction, Semiconducting wafers, Yield improvement, Algorithms

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