Dr. Liang Deng
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Light sources, Metals, Manufacturing, Printing, Very large scale integration, Photomasks, Double patterning technology, Standards development, Resolution enhancement technologies

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Lithographic illumination, Metals, Manufacturing, Solids, Photomasks, Optical proximity correction, Model-based design, Standards development, Resolution enhancement technologies

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Manufacturing, Capacitance, Design for manufacturing, Photomasks, Optical proximity correction, Tolerancing, Process modeling, Resolution enhancement technologies, Design for manufacturability

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Metals, Manufacturing, Capacitance, Photomasks, Optical proximity correction, SRAF, Semiconducting wafers, Resolution enhancement technologies, Chemical mechanical planarization

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Light sources, Lithographic illumination, Scattering, Printing, Photomasks, Optical proximity correction, Model-based design, Standards development, Resolution enhancement technologies

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