Prof. Liang Pan
Assistant Professor at Purdue Univ
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Defense and security, Semiconductors, Nanostructures, Optical lithography, Medicine, Data storage, Molecules, Silicon, Manufacturing, Semiconductor manufacturing

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10353, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications 2017
KEYWORDS: Thermography, Plasmonics, Polarization, Sensors, Nanoparticles, Luminescence, Thermometry, Charge-coupled devices, Temperature metrology, Anisotropy

PROCEEDINGS ARTICLE | August 25, 2017
Proc. SPIE. 10346, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV
KEYWORDS: Lithography, Plasmonics, Electron beam lithography, Electron beams, Surface plasmons, Optical lithography, Lenses, Photoresist materials, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | April 27, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Plasmonics, Surface plasmons, Optical lithography, Lenses, Maskless lithography, Semiconducting wafers, Nanolithography, Beam controllers

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Plasmonics, Electron beam lithography, Electron beams, Optical lithography, Silica, Lenses, Electrodes, Dielectrics, Chromium, 3D modeling, Photoresist materials, Photomasks, Beam shaping, Maskless lithography, Reactive ion etching, Semiconducting wafers, Tolerancing

SPIE Journal Paper | December 18, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Electrodes, Lithography, Tolerancing, 3D modeling, Semiconducting wafers, Dielectrics, Electron beam lithography, Beam shaping, Manufacturing, Mechanical engineering

Showing 5 of 7 publications
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