Dr. Kevin L. Xu
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 24, 2011
Proc. SPIE. 8204, Smart Nano-Micro Materials and Devices
KEYWORDS: Metamaterials, Lithography, Nanoengineering, Ultraviolet radiation, Laser processing, Laser applications, Scanning electron microscopy, Sapphire, Micromachining, Pulsed laser operation

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