Mr. Liangjin Ge Profile

Liangjin Ge

at Univ of Science and Technology of China

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Author

Publications (3)

Proceedings Article | 8 September 2011 Paper

Polymeric nanostructures fabricated by dynamic nanoinscribing technique and its applications

Liangjin Ge, Xudi Wang, Qisheng Tang, Jian Jin, Li Xin, Shaojun Fu

Proceedings Volume 8191, 81912D (2011) https://doi.org/10.1117/12.902409

KEYWORDS: Polymers, Brain-machine interfaces, Nanolithography, Fabrication, Silicon, Positron emission tomography, Nanostructures, Glasses, Nanoimprint lithography, Transmittance

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Proceedings Article | 3 February 2009 Paper

High aspect ratio grating fabrication in SU-8 resist by UV-curing nanoimprint

Xudi Wang, Liangjin Ge, Jingjing Lu, Shaojun Fu

Proceedings Volume 7159, 71590K (2009) https://doi.org/10.1117/12.807006

KEYWORDS: Silicon, Polymers, Nanoimprint lithography, Ultraviolet radiation, Electron beam lithography, Nanophotonics, Glasses, Deep reactive ion etching, Etching, Manufacturing

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Proceedings Article | 21 November 2007 Paper

Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint

Xudi Wang, Zijun Zhang, Liangjin Ge, Yanlin Liao, Shaojun Fu

Proceedings Volume 6827, 68271T (2007) https://doi.org/10.1117/12.757290

KEYWORDS: Ultraviolet radiation, Polymethylmethacrylate, Semiconducting wafers, Transmittance, Scanning electron microscopy, Glasses, Wafer bonding, Nanolithography, Polymers, Silicon

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