Liangjin Ge
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 September 2011
Proc. SPIE. 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
KEYWORDS: Fabrication, Nanostructures, Polymers, Glasses, Silicon, Transmittance, Brain-machine interfaces, Nanoimprint lithography, Positron emission tomography, Nanolithography

Proceedings Article | 3 February 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Electron beam lithography, Etching, Polymers, Glasses, Ultraviolet radiation, Silicon, Manufacturing, Deep reactive ion etching, Nanoimprint lithography, Nanophotonics

Proceedings Article | 21 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Polymethylmethacrylate, Polymers, Glasses, Ultraviolet radiation, Silicon, Scanning electron microscopy, Transmittance, Semiconducting wafers, Wafer bonding, Nanolithography

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