Dr. Libin Zhang
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 30 May 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Line edge roughness, Failure analysis, Bridges, Etching, Lithography, Probability theory, Overlay metrology, Photomasks, Metals, Optical proximity correction

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Roads, Statistical analysis, Polymers, Annealing, Coating, Microelectronics, Directed self assembly, Integrated circuits

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, 3D acquisition, Visualization, Calibration, Metals, Manufacturing, Photomasks, Source mask optimization, Geometrical optics

SPIE Journal Paper | 24 August 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Photomasks, Lithographic illumination, Immersion lithography, Phase shifts, Etching, Picosecond phenomena, Diffraction, Lithography, Scanners, Manufacturing

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Oxides, Lithography, Diffraction, Optical design, Scanners, Interfaces, Manufacturing, Process control, Optical alignment, Structural design, Semiconducting wafers, Overlay metrology, Diffraction gratings, Absorption

Showing 5 of 6 publications
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