Dr. Libin Zhang
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (13)

SPIE Journal Paper | 23 March 2021
JM3 Vol. 20 Issue 01

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Image processing, Image quality, Source mask optimization, Optical proximity correction, SRAF, Model-based design, Resolution enhancement technologies

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Diffraction, Visible radiation, Metrology, Finite-difference time-domain method, Reliability, Signal processing, Semiconductor manufacturing, Tolerancing, Overlay metrology, Chemical mechanical planarization

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Metrology, Transparency, Optical signal processing, Image processing, Image acquisition, Optical testing, Signal processing, Image enhancement, Image contrast enhancement, Overlay metrology

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11614, Design-Process-Technology Co-optimization XV
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Sensors, Neural networks, Machine learning, Optics manufacturing, Yield improvement, Statistical modeling, Performance modeling

Showing 5 of 13 publications
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