Dr. Libor Vyklicky
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Antireflective coatings, Optical lithography, Etching, Coating, Reflectivity, Control systems, Photoresist processing, Standards development, Bottom antireflective coatings

Proceedings Article | 26 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Oxides, Lithography, Optical lithography, Silicon, Resistance, Reflectivity, Electroluminescence, Photoresist materials, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Lithography, Optical lithography, Reflection, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Standards development

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Multilayers, Optical lithography, Etching, Polymers, Interfaces, Silicon, Reflectivity, Photoresist materials, Semiconducting wafers

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