Lidong Wei
at Beijing Institute of Technology
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | November 21, 2014
Proc. SPIE. 9296, International Symposium on Optoelectronic Technology and Application 2014: Advanced Display Technology; Nonimaging Optics: Efficient Design for Illumination and Solar Concentration
KEYWORDS: Optical components, Lithography, Reticles, Eye, Lithographic illumination, Speckle, Speckle pattern, Diffusers, Geometrical optics, Cylindrical lenses

PROCEEDINGS ARTICLE | November 5, 2014
Proc. SPIE. 9272, Optical Design and Testing VI
KEYWORDS: Mirrors, Microlens array, Lithographic illumination, Modulation, Polarization, Wave plates, Microlens, Relays, Immersion lithography, Light

PROCEEDINGS ARTICLE | December 18, 2012
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Lithography, Reticles, Eye, Axicons, Lithographic illumination, Diffractive optical elements, Lens design, Relays, Zoom lenses, Fiber optic illuminators

PROCEEDINGS ARTICLE | October 16, 2012
Proc. SPIE. 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Lithography, Reticles, Eye, Lithographic illumination, Excimer lasers, Beam shaping, Spherical lenses, Tolerancing, 193nm lithography, Fiber optic illuminators

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