Dr. Liesbeth Witters Profile

Dr. Liesbeth Witters

at imec

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Publications (2)

Proceedings Article | 20 March 2020 Paper

EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment

Takeyoshi Ohashi, Kazuhisa Hasumi, Masami Ikota, Gian Lorusso, Liesbeth Witters, Naoto Horiguchi

Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

KEYWORDS: Germanium, Metrology, Field effect transistors, Inspection, Scanning electron microscopy, Silicon, Semiconducting wafers, Electron beams

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Proceedings Article | 20 March 2019 Paper

Fabrication challenges and opportunities for high-mobility materials: from CMOS applications to emerging derivative technologies

N. Collaert, A. Alian, B. De Jaeger, U. Peralagu, A. Vais, A. Walke, L. Witters, H. Yu, E. Capogreco, K. Devriendt, T. Hopf, K. Kenis, G. Mannaert, A. Milenin, A. Peter, F. Sebaai, L. Teugels, D. van Dorp, K. Wostyn, N. Horiguchi, N. Waldron

Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII

KEYWORDS: Germanium, Gallium nitride, Gallium arsenide, CMOS technology, Field effect transistors, Fin field effect transistors, Group III-V semiconductors

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