Dr. Lifeng Duan
Product Director at Shanghai Micro Electronics Equipment Co Ltd
SPIE Involvement:
Publications (20)

SPIE Journal Paper | 24 January 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Particle filters, Filtering (signal processing), Thermal modeling, Particles, Semiconducting wafers, Projection systems, Lithography, Photomasks, Data modeling, Calibration

SPIE Journal Paper | 11 April 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Data modeling, Manufacturing, Particle filters, Projection systems, Semiconducting wafers, Thermal modeling

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Optical components, Lithography, Refractive index, Optical design, Optical lithography, Silica, Wavefront aberrations, Lens design, Thermal analysis, Photomasks, Thermal modeling

SPIE Journal Paper | 13 November 2014
JM3 Vol. 14 Issue 01
KEYWORDS: Photomasks, In situ metrology, Process modeling, Image processing, Lithography, Principal component analysis, Error analysis, Image retrieval, Semiconducting wafers, Zernike polynomials

Showing 5 of 20 publications
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