Liguo Zhang
Sr. Manager at Mentor, a Siemens Business
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Logic, Roads, Visualization, Databases, Manufacturing, Computer simulations, Image classification, Library classification systems

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Multilayers, Visualization, Manufacturing, Intellectual property

Proceedings Article | 4 April 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Phase modulation, Visualization, Computer simulations, Monte Carlo methods, Image classification, Probability theory, Intellectual property, Standards development, Library classification systems, Design for manufacturability

Proceedings Article | 28 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Metals, Image processing, Solar cells, Electroluminescence, Photomasks, Source mask optimization, Molybdenum, Optimization (mathematics), Process modeling, Resolution enhancement technologies, Lead

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Roads, Visualization, Manufacturing, Legal, Monte Carlo methods, Design for manufacturing, Acquisition tracking and pointing, Double patterning technology, Optical proximity correction, Resolution enhancement technologies, Design for manufacturability

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Design for manufacturing, Photomasks, Double patterning technology, Immersion lithography, Source mask optimization, Optical proximity correction, Analytical research, Algorithm development, Optimization (mathematics), New and emerging technologies

Showing 5 of 30 publications
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