Liguo Zhang
Sr. Manager at Siemens EDA
SPIE Involvement:
Publications (32)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Statistical analysis, Calibration, Control systems, Scanning electron microscopy, Process control, Semiconductor manufacturing, Process modeling

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Silicon, Manufacturing, Design for manufacturing, Optical proximity correction, Resolution enhancement technologies, Chemical mechanical planarization

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Logic, Roads, Visualization, Databases, Manufacturing, Computer simulations, Image classification, Library classification systems

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Multilayers, Visualization, Manufacturing, Intellectual property

Proceedings Article | 4 April 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Phase modulation, Visualization, Computer simulations, Monte Carlo methods, Image classification, Probability theory, Intellectual property, Standards development, Library classification systems, Design for manufacturability

Showing 5 of 32 publications
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