Mr. Lihua Huang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | December 19, 2013
Proc. SPIE. 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Lithography, Diffraction, Homogenization, Microlens array, Lithographic illumination, Deep ultraviolet, Inspection, CCD cameras, Optical simulations, Excimer lasers

PROCEEDINGS ARTICLE | December 19, 2013
Proc. SPIE. 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Lithography, Mirrors, Beam splitters, Image processing, Error analysis, Reflectivity, Beam delivery, Control systems, Image analysis, Beam controllers

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications
KEYWORDS: Mirrors, Optical sensors, Statistical analysis, Fluorometers, Luminescence, Ions, Computing systems, Ultraviolet light emitting diodes, Optical instrument design, Lanthanides

PROCEEDINGS ARTICLE | January 28, 2009
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Particles, Interfaces, Biosensors, Control systems, Phosphorescence, Signal processing, Particle filters, Image filtering, Signal detection, Control systems design

PROCEEDINGS ARTICLE | January 28, 2009
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Gold, Scattering, Particles, Light scattering, Reflectivity, Scanning electron microscopy, Transmittance, Mie scattering, Photometry, Absorption

PROCEEDINGS ARTICLE | May 1, 2007
Proc. SPIE. 6534, Fifth International Conference on Photonics and Imaging in Biology and Medicine
KEYWORDS: Photodetectors, Mirrors, Particles, Biosensors, Control systems, Phosphorescence, LCDs, Data processing, Particle filters, Process control

Showing 5 of 9 publications
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