Dr. Lihui Liu
at Beijing Institute of Technology
SPIE Involvement:
Author
Publications (29)

PROCEEDINGS ARTICLE | January 12, 2018
Proc. SPIE. 10622, 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices
KEYWORDS: Lithography, Visible radiation, Finite-difference time-domain method, Polarization, Silver, Wave plates, Quantitative analysis

SPIE Journal Paper | November 21, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Photomasks, Source mask optimization, Artificial intelligence, Immersion lithography, Lithography, Optical fiber cables, Image processing, Binary data, Imaging systems, Resolution enhancement technologies

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II
KEYWORDS: Lithography, 3D acquisition, Lithographic illumination, Cadmium, Polarization, Image processing, Error analysis, Projection systems, Immersion lithography, Critical dimension metrology

PROCEEDINGS ARTICLE | August 21, 2014
Proc. SPIE. 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Lithographic illumination, Cadmium, Polarization, Birefringence, Crystals, Projection systems, Immersion lithography, Critical dimension metrology, Protactinium

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, Modulation, Polarization, Imaging systems, Computer simulations, Photomasks, Source mask optimization, Optimization (mathematics), Neptunium

SPIE Journal Paper | March 18, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Photomasks, Source mask optimization, Lithography, Electroluminescence, Photoresist materials, Nanoimprint lithography, Metrology, Photoresist developing, Transmittance, Lithium

Showing 5 of 29 publications
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