Dr. Lihui Liu
at Beijing Institute of Technology
SPIE Involvement:
Author
Publications (33)

PROCEEDINGS ARTICLE | December 12, 2018
Proc. SPIE. 10847, Optical Precision Manufacturing, Testing, and Applications
KEYWORDS: Optical components, Point spread functions, Linear polarizers, Polarization, Calibration, Wave plates, Poincaré sphere, Modulators, Charge-coupled devices, Probability theory

PROCEEDINGS ARTICLE | December 12, 2018
Proc. SPIE. 10847, Optical Precision Manufacturing, Testing, and Applications
KEYWORDS: Superposition, Diffraction, Modulation, Optical vortices

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Lithography, Monochromatic aberrations, Error analysis, Manufacturing, Wavefronts, Distortion, Image quality, Objectives, Tolerancing, Assembly tolerances

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Diffraction, Super resolution, Modulation, Polarization, Optical vortices, Beam shaping, Spiral phase plates

PROCEEDINGS ARTICLE | January 12, 2018
Proc. SPIE. 10622, 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices
KEYWORDS: Lithography, Visible radiation, Finite-difference time-domain method, Polarization, Silver, Wave plates, Quantitative analysis

SPIE Journal Paper | November 21, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Photomasks, Source mask optimization, Artificial intelligence, Immersion lithography, Lithography, Optical fiber cables, Image processing, Binary data, Imaging systems, Resolution enhancement technologies

Showing 5 of 33 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top