Lijun Shen
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 18, 2014
Proc. SPIE. 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Statistical analysis, Fluctuations and noise, Interferometers, Silicon, Reliability, Surface roughness, Optical testing, Mathematics, Optics manufacturing, Electronic support measures

PROCEEDINGS ARTICLE | August 6, 2014
Proc. SPIE. 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Mirrors, Electronics, Polishing, Glasses, Particles, Surface roughness, Information technology, Abrasives, Semiconducting wafers, Surface finishing

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