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Lili Jiang
at Harvard John A Paulson School of Engineering and Applied Sciences
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Publications (1)
Proceedings Article | 18 March 2013 Paper
Optimizing anatase-TiO2 deposition for low-loss planar waveguides
Lili Jiang, Christopher Evans, Orad Reshef, Eric Mazur
Proceedings Volume 8626, 86261D (2013) https://doi.org/10.1117/12.2005169
KEYWORDS: Oxygen, Thin films, Crystals, Sputter deposition, Annealing, Raman spectroscopy, Thin film devices, Prisms, Silicon, Titanium dioxide
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