This paper primarily involves in coupled vibrating between the micro airflow and its electrostatic actuator in a MEMS
sealed chamber structure. Both the air damping effect and the Rayleigh-ritz energy method have been utilized to
investigate the coupled effect between the micro airflow and its actuator. The air pressure distribution of the micro
airflow has been determined by solving the linerized isothermal compressible Reynolds' equation and combined with the
sealed pressure boundary condition. The coupled model of electrostatic-Silicon membrane-micro airflow has been
established according to the Rayleigh-Ritz energy method. From the coupled model, the undetermined coefficient of the
displacement function of such coupled vibrating can be derived. By comparing the undetermined coefficient λ' of the
displacement function without micro airflow and the undetermined coefficient λ' of the displacement function with
micro airflow, the air damping factor has been extracted. The influencing of micro airflow on electrostatic actuator can
be exhibited by such air damping factor. And dynamic performance of this kind of MEMS fluidic devices can be
improved by regulating and controlling the air damping factor. All the investigation provide theoretical foundation and
control strategy for micro fluid actuating.
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