Dr. Lin-Hung Shiu
Technical Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Superposition, Microfluidics, Scanners, Particles, Digital watermarking, Computer simulations, Printing, System identification, Immersion lithography, Semiconducting wafers

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Wafer-level optics, Polymers, Particles, Digital watermarking, Scanning electron microscopy, Printing, Immersion lithography, Neodymium, Semiconducting wafers, Defect inspection

SPIE Journal Paper | 1 January 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Semiconducting wafers, Particles, Immersion lithography, Printing, Scanners, Double patterning technology, Liquids, Digital watermarking, Wafer testing, Reticles

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffraction, Optical lithography, Polarization, Lenses, Image acquisition, Computer simulations, Projection systems, Photomasks, Immersion lithography, Semiconducting wafers

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Microfluidics, Water, Scanners, Particles, Finite element methods, Immersion lithography, Semiconducting wafers, Prototyping, Overlay metrology

Proceedings Article | 20 August 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Electron beam lithography, Image processing, Laser energy, Scanning electron microscopy, Photomasks, Optical simulations, Optical proximity correction, Convolution, Semiconducting wafers

Showing 5 of 11 publications
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