Lin Li
at Xiamen Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 January 2008 Paper
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Semiconducting wafers, Electrodes, Capacitors, Glasses, Energy harvesting, Microelectromechanical systems, Silicon, Metals, Wind energy, Aluminum

Proceedings Article | 4 January 2008 Paper
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Capacitors, Electrodes, Ferroelectric materials, Energy harvesting, Capacitance, Glasses, Silicon, Aluminum, Platinum, Semiconducting wafers

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