Lin Yang
at Tsinghua Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Semiconductors, Diffraction, Metrology, Reflectivity, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Scatterometry, Photomasks, Diffraction gratings

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